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MEMS Test System Based on Virtual Instrument Technology 总被引：1，自引：0，他引：1
On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 μm and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively. 相似文献
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Optical flow method is one of the most important methods of analyzing motion images.Optical flow field is used to analyze characteristics of motion objects.According to motion features of micro-electronic mechanical system(MEMS)micro-structure,the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure.Firstly,high speed motion states for each frequency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle.Thus a series of image sequences,and can obtain reliable and precise optical field and reduce computing time.As micro-resonator of urement precision of the presented algorithm is high,and measurement repeatability reaches 40 am under the same experiment condition. 相似文献
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