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A series of ablation experiments on silicon surface by femtosecond laser system of 775 nm and 150 fs duration pulses were carried out.The morphological characteristics and the associated effect in the ablation were tested by atomic force microscope (AFM),scanning electron microscope (SEM),focused ion beam (FIB),and the optic microscope.The single pulse threshold can be obtained directly.For the multiple pulses,the ablation threshold varies with the number of pulses applied to the surface due to the incubation effect.By analyzing the experimental data,the thresholds of laser fluences under various laser pulse numbers were obtained,and the relationships between ablation area and laser energy and laser pulse number were concluded.Meanwhile,the periodic ripple structure on silicon surface was found.Under the condition of certain laser power,the number of laser pulse can influence the formation of ripples.  相似文献   
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校企合作培养工程硕士的创新与实践   总被引:5,自引:2,他引:3  
认为校企互动不足是影响工程硕士专业学位研究生教育科学发展的瓶颈.介绍天津大学在长期的工程硕士教育实践中的做法,即坚持校企紧密合作,聚焦企业需求,服务行业发展,创新工程硕士教育的办学理念:面向企业自主创新,实施"订单"培养,创新工程硕士生的培养模式;重点服务国家大中型企业和重大工程建设项目,校企合作实现双赢.  相似文献   
3.
The influence of external low frequency (0-100 Hz) vibration on the tip-sample interaction in SPM is the main concern of this paper. A concept, vibration rejection ratio (VRR) proposed by Thompson et al, was investigated theoretically and experimentally. A concise theoretical background was introduced, a vibration stimulating and measuring system for SPM was built up, and an experimental research of the influence on SPM VRR was carried out with different SPM probes, samples, tip pre-loads and open/close loops of tip-sample interaction. It was proved both in theory and experiment that SPM VRR had correlations with the spring constant, the air damping constant, the effective mass of the cantilever, the contact spring constant and the contact damping constant between tip and sample. SPM's vibration rejecting ability can be improved by longer cantilever probe, softer sample surface, greater tip pre-load, and close-loop control for tip-sample interaction. More attention should be paid to a proper combination of the above parameters.  相似文献   
4.
MEMS Test System Based on Virtual Instrument Technology   总被引:1,自引:0,他引:1  
On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 μm and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.  相似文献   
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The surface acoustic wave (SAW) propagating in a sample of steel is simulated by using finite element method (FEM). The waves are excited by a load function with propagation properties such as phase velocity dispersion and wide bandwidth. A two-dimensional model consisting of surface defects loaded with a wideband 50-200 MHz and short time 0.1 μs displacement function is investigated in the time and frequency domains. By transient dynamic analysis, Fourier transform and dispersion calculation, snapshots of propagating wave and responses from sensing points are presented. It is indicated that this supervision approach is sensitive to the surface cracks and reflections.  相似文献   
6.
Three-dimensional molecular dynamics simulations are carried out to study the mechanism of nanometric processing of ion implanted monocrystalline silicon surfaces. Lattice transformation is observed during implantation and nano-indentation using radial distribution function and geometric criterion damage detection. Nano-indentation is simulated to study the changes of mechanical property. Implantation analysis shows the existence of amorphous phase. Indentation process shows the lattice evolution, which is beneficial for reducing fractures during processing. The indentation results reveal the reduction of brittleness and hardness of the implanted surface. The ion fluence is in direct proportion to the damage, and inverse to the hardness of the material. Experiments of ion implar, tation, nanoindentation, nano-scratching and nanometric cutting were carried out to verify the simulation results.  相似文献   
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