| Characterization of a-Si:H/SiN multilayer waveguide polarization using an optical pumping application—LED |
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| 基金项目： | Project supported by the Waseda University Undergraduate Fund, Japan, and Malaysia Majlis Amanah Rakyat （MARA） through the MARA Scholarship Foundation.ACKNOWLEDGEMENT This project was conducted at the Department of Electronics Information and Communication Engineering, School of Science and Engineering, Waseda University, under the supervision of Prof. Dr. Isamu Kato, head of Kato＇s Photonics Laboratory. |
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| 摘 要： | This paper describes the fabrication of a waveguide and the analysis of its polarization characteristics by applying light-emitting diode （LED） pumping lights to its surface. By using double tubed coaxial line （DTCL） microwave plasma chemical vapor deposition （MPCVD） equipment, an a-Si：H/SiN multilayer waveguide was fabricated whose thickness could be controlled at nanometer order. The main structural material of the waveguide sample consisted of a combination of layers of amorphous silicon hydrogen and silicon nitrate. Once the sample was ready, another major objective of the experiment was to analyze the polarization characteristics of the fabricated waveguide. The idea of the experiment was to analyze how the waveguide reacts when three types of LED （blue, yellow, and red） are radiated onto its surface. The results showed that the fabrication of the a-Si：H/SiN sample is successful. Most effective transmission results, which accord with the polarization characteristics analysis, were obtained.
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| 关 键 词： | 多层波导 LED 微波等离子体化学气相沉积法 氮化 Si 应用 抽水 光偏振 |
| 收稿时间： | 27 September 2006 |
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