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A novel structure of all-optical type silicon microresonator
Authors:Ding Chun  Wang Yue-lin  Jin Zhong-he  Wang Dong-ping
Institution:(1) Dept. of Information Science and Electronic Engineering, Zhejiang University, 310027 Hangzhou, China;(2) State Key Laboratory of Transducer Technology, Zhejiang University, 310027 Hangzhou, China
Abstract:A novel All-Optical type Silicon MicroResonator (AOSMR), with exciting and testing optical fibers is reported in this paper. It consists of a ridge optical waveguide and input and output optical fibers to pick up vibrations. The advantages include simplicity in structure and convenience in operation. Both theoretical analysis and experimental results showed that the new structure has large misalignment tolerance between the fiber and vibrator. The optical length of the fiber does not affect the output signal. In addition, the resonant frequency of the vibrator is independent of the internal stress of the silicon wafer. Project supported by the State Key Laboratory of Transducer Technology.
Keywords:all-optical type  microresonator  cantilever  ridge waveguide  optical fiber  pigtail
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