| 低压等离子体结合热解法制备金刚石膜 |
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| 引用本文： | 庞国锋,韩惠雯.低压等离子体结合热解法制备金刚石膜[J].科技通报,1995,11(1):1-6. |
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| 作者姓名： | 庞国锋 韩惠雯 |
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| 作者单位： | 杭州大学特种材料研究所，杭州半导体厂 |
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| 基金项目： | 国家自然科学基金,浙江省自然科学基金 |
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| 摘 要： | 金刚石膜具有天然金刚石相拟的优异特性，预计会有十分广阔的应用前景，本文介绍了一种新颖的金刚石膜生长技术－强流电子增强化学气相沉积法，它结合了传统的热丝法和等离子体法各自的优点，成为一种具有较高生长速率，能够制备大面积均匀金刚石膜的技术，对用这种方法制备的金刚石膜进行了喇曼、扫描电镜和Ｘ－Ｒａｙ衍射分析，并对这项技术的优点作了阐述。
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| 关 键 词： | 金刚石 膜 等离子体法 热解法 低压 生长 |
Diamond Film Growth by Low DC Voltage Plasma CVD Method Assisted with Thermolysis |
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| Pang Guofeng, Shi Chengru, Han Huiwen.Diamond Film Growth by Low DC Voltage Plasma CVD Method Assisted with Thermolysis[J].Bulletin of Science and Technology,1995,11(1):1-6. |
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| Authors: | Pang Guofeng Shi Chengru Han Huiwen |
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| Abstract: | The synthetic diamond films have many superior properties like natural diamond so that they are pre-sumed to have a glorious future of potential applications.A novel technique was presented in this work,whichwas called Intense Electron-current Enhanced Chemical Vapor Deposition(IECVD).It possesses the advan-tages of both the conventional hot filament CVD and the plasma CVD so that it could prepare large area ho-mogeneous diamond film with higher growth rate. The diamond films synthesized with this method were char-acterized by Raman spectroscopy,SEM,and XRD. |
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| Keywords: | diamond film Intense electron-current Raman spectroscopy |
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