| FeSiAl合金磁性薄膜的制备与研究 |
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| 引用本文： | 张榕,裔国瑜,任洪梅,阎明.FeSiAl合金磁性薄膜的制备与研究[J].上海海事大学学报,2003,24(4):378-380. |
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| 作者姓名： | 张榕 裔国瑜 任洪梅 阎明 |
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| 作者单位： | 上海海运学院,基础科学部,上海,200135 |
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| 摘 要： | 用X-射线衍射,扫描电子显微镜研究了直流磁控溅射法制备的FeSiAl合金薄膜。用振动样品磁强计测量了薄膜的磁性能。主要研究了热处理对薄膜的结构和磁性能的影响。结果表明随着退火温度的升高,薄膜的X衍射峰(220)逐步尖锐化,矫顽力不断减小,磁性能有了较大的提高。
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| 关 键 词： | FeSiAl薄膜 直流磁控溅射 热处理 |
| 文章编号： | 1000-5188(2003)04-0378-0004 |
| 修稿时间： | 2003年6月10日 |
Preparation and Investigation of Magnetic Sendust Alloy Thin Films |
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| ZHANG Rong,YI Guo yu,REN Hong mei,YAN Ming.Preparation and Investigation of Magnetic Sendust Alloy Thin Films[J].Journal of Shanghai Maritime University,2003,24(4):378-380. |
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| Authors: | ZHANG Rong YI Guo yu REN Hong mei YAN Ming |
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| Abstract: | The magnetic FeSiAl films prepared by DC magnetron sputtering have been studied using X ray diffraction and SEM.The magnetic properties of FeSiAl films have been measured by using VSM. It is shown that with advancing annealing temperature, the peak of preferred (220) orientation is higher and sharper, the coercivity of the film is smaller. The magnetic properties are better after annealing. |
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| Keywords: | FeSiAl films DC magnetron sputtering annealing |
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