| 离子溅射能量损失及射程的模拟研究 |
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| 引用本文： | 张德根,邹俊峰,赵敏福.离子溅射能量损失及射程的模拟研究[J].巢湖学院学报,2009,11(6):37-41. |
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| 作者姓名： | 张德根 邹俊峰 赵敏福 |
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| 作者单位： | 皖西学院基础实验中心,安徽,六安,237012 |
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| 摘 要： | 运用SRIM2006软件对靶材的溅射进行了模拟,计算了各种情况下离子入射靶材能量损失和射程分布,分析其内部碰撞机理,得到了入射离子能量损失和射程分布随离子能量得变化规律:低能离子溅射能量损失以核阻止为主,高能离子溅射能量损失以电子阻止为主;载能离子的能量损失及射程与入射离子和靶原子有关;对于低能离子溅射靶材,入射离子主要分布在靶材表面几层原子内.
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| 关 键 词： | 溅射 能量损失 射程 |
THE SIMULATION RESEARCH ON ENERGY LOSS AND RANGE OF SPUTTERING IONS |
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| ZHANG De-gen,ZOU Jun-feng,ZHAO Min-fu.THE SIMULATION RESEARCH ON ENERGY LOSS AND RANGE OF SPUTTERING IONS[J].Chaohu College Journal,2009,11(6):37-41. |
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| Authors: | ZHANG De-gen ZOU Jun-feng ZHAO Min-fu |
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| Institution: | ZHANG De-gen ZOU Jun-feng ZHAO Min-fu(The center of basic experiment,West Anhui University,Luan Anhui 237012) |
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| Abstract: | The sputtering process for targets was simulated using SRIM2006 software,ion energy loss and range of the target distribution were calculated under a variety of circumstances,by analysising the internal mechanism of collision,energy loss of incident ions with the ion range distribution and energy changed,the general rules as following: The nuclear stopping power gives priority to the energy loss of low energy ion sputtering,the electronic stopping power gives priority to the energy loss of high-energy ion s... |
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| Keywords: | SRIM2006 |
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