Implementation of autofocus in alignment system for layered imprint fabrication |
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| Authors: | Quandai Wang Yugang Duan Bingheng Lu Jiawei Xiang Lianfa Yang |
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| Institution: | 1. State Key Lab for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
2. School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology,Guilin 541004, China |
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| Abstract: | Autofocus method based on the analysis of image content information is investigated to reduce the alignment error resulting from mark positioning uncertainty due to defocus in microstructure layered fabrication process based on multilevel imprint lithography, The applicability of several autofocus functions to the alignment mark images is evaluated concerning their uniformity, sharpness near peak, reliability and measure computation efficiency and the most suitable one based on power spectrum in frequency domain (PSFD) is adopted. To solve the problem of too much computation amount needed in PSFD algorithm, the strategy of interested region detection and effective image reconstruction is proposed and the algorithm efficiency is improved. The test results show that the computation time is reduced from 0.316 s to 0.023 s under the same conditions while the other merits of the function are preserved, which indicates that the modified algorithm can meet the mark image autofocusing require-ments in response time, accuracy and robustness. The alignment error due to defocus which is about 0.5 μm indi-cated by experimental results can be reduced or eliminated by the autofocusing implementation. |
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| Keywords: | autofocus algorithm alignment imprint lithography layered fabrication |
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