| 硬质薄膜耐磨性的凹坑磨损法 |
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| 引用本文： | 虞晓江,李戈扬,吴桢干,竺品芳.硬质薄膜耐磨性的凹坑磨损法[J].实验室研究与探索,2001,20(1):37-38,42. |
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| 作者姓名： | 虞晓江 李戈扬 吴桢干 竺品芳 |
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| 作者单位： | 上海交通大学 |
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| 基金项目： | 金属基复合材料国家重点实验室开放基金项目。 |
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| 摘 要： | 薄膜镀层由于厚度小，难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法，并对TaN/NbN纳米多层膜和TaN、NbN单层膜进行了磨损实验。结果表明，精密凹坑研磨仪是一种适用于评价薄膜镀层耐磨性的方法。TaN/NbN纳米多层膜有TaN、TbN单层膜更高的耐磨性。
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| 关 键 词： | 硬质薄膜 耐磨性 精密凹坑研磨仪 TaN／NbN纳米多层膜 |
| 文章编号： | 1006-7167(2001)01-0037-02 |
Dimple-Grinding Method to Evaluate Hard Films'
Antiwear Properties |
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| YU Xiao-jiang,LIGe-yang,WU Zhen-gan,ZHU Pin-fang.Dimple-Grinding Method to Evaluate Hard Films''''
Antiwear Properties[J].Laboratory Research and Exploration,2001,20(1):37-38,42. |
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| Authors: | YU Xiao-jiang LIGe-yang WU Zhen-gan ZHU Pin-fang |
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| Abstract: | The antiwear properties of thin film coatings are difficult to be evaluated by ordinary method becausethe coatings are too thin in thickness. A precise dimple-grinding method was introduced and discussed and theantiwear properties of TaN/NbN nano-multilayer film, TaN and NhN single layer films were evaluated by thisnew method. The results show that the precise dimple-grinding method is a proper method to evaluate the antiwear properties of thin film coatings. TaN/NbN nano-multilayer film shows a better antiwear property thanTaN and NbN single layers. |
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| Keywords: | hard films antiwear properties precise dimple grinder TaN/NbN nano-multilayer film |
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