| 双源超声雾化热解喷涂仪研制 |
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| 引用本文： | 高洪明,刘强,龚恒翔,程新路.双源超声雾化热解喷涂仪研制[J].实验室研究与探索,2011,30(4):6-8. |
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| 作者姓名： | 高洪明 刘强 龚恒翔 程新路 |
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| 作者单位： | 1. 重庆理工大学光电信息学院,重庆,400054
2. 四川大学原子分子物理研究所,四川成都,610065 |
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| 基金项目： | 国家自然科学基金资助项目，重庆理工大学青年基金资助项目 |
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| 摘 要： | 单源超声雾化室实验系统在制备掺杂薄膜时,由于制备前驱源溶液与掺杂溶液混合在同一个雾化室,几种不同的溶液之间相互影响,对制备高质量的掺杂薄膜非常不利;同时单源超声雾化室的沉积速度较慢,不利于向工业化方向转化;双源超声雾化室避免了在制备掺杂薄膜时掺杂溶液和源溶液混合而互相污染的弊病,从根本上解决了单源超声雾化热喷涂法制备掺杂薄膜存在的问题;同时衬底取向朝下,采用竖直向上的供料方式沉积薄膜,利用重力直接筛选大雾滴,沉积薄膜的雾滴粒径分布更加集中。
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| 关 键 词： | 超声雾化 氧化锌 X射线衍射 |
Development of the Dual-Source Ultrasonic Spray Pyrolysis Instrument |
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| GAO Hong-ming,LIU Qiang,GONG Heng-xiang,CHENG Xin-lu.Development of the Dual-Source Ultrasonic Spray Pyrolysis Instrument[J].Laboratory Research and Exploration,2011,30(4):6-8. |
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| Authors: | GAO Hong-ming LIU Qiang GONG Heng-xiang CHENG Xin-lu |
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| Institution: | 1.School of Optical and Electronical Information,Chongqing University of Technology,Chongqing 400054,China;2.Institute of Atomic and Molecular Physics,Sichuan University,Chengdu 610065,China) |
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| Abstract: | The dual-source ultrasonic spray pyrolysis instrument basd on the principle of ultrasonic spray pyrolysis was studied.It is incovenient using single-source ultrasonic spray chamber test system in the preparation of doped films because the prepared source precursor solution may be mixed with the doping solution spray in the same room.Therefore,the mixed solution will influence the preparation of high-quality doped hybrid film.At the same time,single-source ultrasonic spray deposition chamber behaves more slowly and thus is not conducive to industrialization.This work has improved the experimental setup and therefore increased the preparation efficiency and quality of ZnO thin films.This paper also proposed the following innovation: namely,keep the orientation of substrate down and provide material vertical up to deposit thin films,this method can exclude those large size particles using gravity and thus high-quality thin films can be formed. |
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| Keywords: | ultrasonic spray pyrolysis ZnO XRD |
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