| 椭偏法测量薄膜厚度与折射率实验的若干探讨 |
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| 引用本文： | 何龙庆.椭偏法测量薄膜厚度与折射率实验的若干探讨[J].南京晓庄学院学报,2012(6):26-30. |
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| 作者姓名： | 何龙庆 |
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| 作者单位： | 南京晓庄学院物理与电子工程学院,江苏南京,211171 |
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| 摘 要： | 作者利用光学实验中的常规仪器完成了椭偏法测量薄膜的厚度与折射率,探讨了减小误差,提高测量精度的措施.文中还对文献2]中某些易于产生困惑之处做了分析并给出了合理的解释.
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| 关 键 词： | 椭圆偏振术 薄膜厚度 折射率 1/4波片快轴 |
Some Explorations on Measuring the Refractive Index & Thickness of Films Based on Ellipsometry |
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| HE Long-qing.Some Explorations on Measuring the Refractive Index & Thickness of Films Based on Ellipsometry[J].Journal of Nanjing Xiaozhuang College,2012(6):26-30. |
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| Authors: | HE Long-qing |
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| Institution: | HE Long-qing(School of Physics and Electronic Engineering,Nanjing Xiaozhuang University,Nanjing 211171,Jiangsu) |
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| Abstract: | |
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| Keywords: | ellipsometry thickness of films refractive index fast axis of the aquarter wave plate |
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