| 二维轴对称电子回旋共振等离子体磁场的数值模拟 |
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| 引用本文： | 段萍,刘金寿,高泽红,崔少燕,刘悦.二维轴对称电子回旋共振等离子体磁场的数值模拟[J].大连大学学报,2006,27(6):8-10,19. |
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| 作者姓名： | 段萍 刘金寿 高泽红 崔少燕 刘悦 |
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| 作者单位： | 1. 大连大学,物理科学与技术学院,辽宁,大连,116622
2. 大连理工大学,物理系,辽宁,大连,116024 |
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| 摘 要： | 本文根据大连理工大学三束材料改性国家重点实验室的电子回旋共振(ECR)微波等离子实验装置,结合等离子体源中的各种物理参量,采用一种简便快捷的方法在计算机上对ECR等离子体的磁场位形进行了数值模拟,数值模拟结果表明在共振区磁场强度的值达到最大值,这与实验结果一致.
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| 关 键 词： | ECR等离子体 磁场 流体模型 数值模拟 |
| 文章编号： | 1008-2395（2006）06-0008-04 |
| 收稿时间： | 2006-06-27 |
| 修稿时间： | 2006年6月27日 |
Numerical simulation of electron cyclotron resonance plasma of a two-dimensional axial symmetric magnetic field |
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| DUAN Ping,LIU Jin-shou,GAO Ze-hong,CUI Shao-yan,LIU Yue.Numerical simulation of electron cyclotron resonance plasma of a two-dimensional axial symmetric magnetic field[J].Journal of Dalian University,2006,27(6):8-10,19. |
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| Authors: | DUAN Ping LIU Jin-shou GAO Ze-hong CUI Shao-yan LIU Yue |
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| Abstract: | The microwave ECR plasma source device of state key laboratory of materials modification by laser,ion and electron beams belongs to Dalian University of Technology.In this paper,this device was used to obtain the numerical simulation of magnetic field configuration based on varies physical parameters.Numerical simulation result showed that the magnetic field reached the maximum value at the resonance zone along the axial position.This result is conformed to the experimental measurement. |
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| Keywords: | ECR plasma magnetic field fluid model numerical simulation |
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