| 微悬臂梁的热机械性能分析及选材 |
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| 引用本文： | 梁明富,赵翔.微悬臂梁的热机械性能分析及选材[J].兰州石化职业技术学院学报,2007,7(1):1-3. |
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| 作者姓名： | 梁明富 赵翔 |
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| 作者单位： | 1. 扬州市职业大学,招生办,江苏,扬州,225009
2. 扬州市职业大学,机械工程系,江苏,扬州,225009 |
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| 摘 要： | 由微悬臂梁结构组成的红外焦平面阵列(FPA)是基于微机电系统结构的非制冷型红外成像系统的核心技术,通过对双金属悬臂梁应力和应变的分析,阐述了影响微悬臂梁热机械性能的主要因素,为正确选择微悬臂梁结构的材质提供理论依据.
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| 关 键 词： | 非制冷红外成像系统 微悬臂梁 热机械性能 |
| 文章编号： | 1671-4067（2007）01-0001-03 |
| 收稿时间： | 2007-03-01 |
| 修稿时间： | 2007年3月1日 |
An Analysis of Microcantilever's Thermomechanical Performance and Selection of Material |
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| LIANG Ming-fu,ZHAO Xiang.An Analysis of Microcantilever''''s Thermomechanical Performance and Selection of Material[J].Journal of Lanzhou Petrochemical Vocational College of Technology,2007,7(1):1-3. |
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| Authors: | LIANG Ming-fu ZHAO Xiang |
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| Abstract: | The infared focal plane array made up of microcantilevers is the key technology in the uncooled infrared imaging systems based on the MEMS.In this paper,the analysis of thermomechanical performance has been made on microcantilever,and the proper selection of microcantilever's material also has been discussed,both of which are of great importance to its successful application. |
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| Keywords: | uncooled infrared imaging system microcantilever thermomechanical performance |
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