Practical finite-time command filtered backstepping control of MPCVD reactor systems with uncertainties |
| |
| Institution: | 1. Ningbo Institute of Intelligent Equipment Technology Co., Ltd, Ningbo 315201, China;2. Yongjiang Laboratory, Ningbo 315202, China;3. Research Institute of Intelligent Control and Systems, School of Astronautics, Harbin Institute of Technology, Harbin 150001, China;1. School of Automation, Nanjing University of Information Science and Technology, Nanjing, 210044, China;2. Collaborative Innovation Center of Atmospheric Environment and Equipment Technology, Nanjing University of Information Science and Technology, Nanjing, 210044, China;3. Jiangsu Province Engineering Research Center of Intelligent Meteorological Exploration Robot, Nanjing, 210044, China;1. Department of Automation, Xiamen University, Xiamen, Fujian 361005, China;2. School of Systems Design and Intelligent Manufacturing, South University of Science and Technology, Shenzhen Guangdong 518000, China;1. Jiangsu Collaborative Innovation Center of Atmospheric Environment and Equipment Technology, Nanjing University of Information Science and Technology, Nanjing 210044, China;2. Center for Control Theory and Guidance Technology, Harbin Institute of Technology, Harbin 150001, China;1. Department of Mathematics, Harbin Institute of Technology, Harbin 150001, China;2. School of Computer and Control Engineering, Yantai University, Yantai, Shandong 264005, China |
| |
| Abstract: | A practical finite-time command filtered backstepping control method is proposed in this paper for a microwave plasma chemical vapor deposition (MPCVD) reactor system. The MPCVD reactor system is modeled as a coupled nonlinear system with unknown control direction functions and unknown nonlinearities. To address the unknown nonlinearities, novel practical finite-time command filters are proposed to construct the estimations of such nonlinearities. On the other hand, an equivalent augmented system of the reactor system is proposed to address the design challenges that posed by the system unknown control direction functions. Additionally, it can be concluded that the proposed control method ensures practical finite-time stability of the reactor system tracking errors by using the practical finite-time Lyapunov stability criterion. Finally, the effectiveness of the approach is demonstrated through the simulation results. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
