| SAW氢传感器的有限元仿真与分析 |
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| 作者单位： | 江西蓝天学院机械与电子工程设计研究所 江西南昌330098(周俊静)，南京工业大学机械与动力工程学院 江苏南京210009(殷晨波) |
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| 摘 要： | 介绍了声表面波延迟线型氢传感器的有限元模型,并在ANSYS8.0平台上对此进行了仿真。压电基底采用Y-X切铌酸锂(LiNbO3),敏感薄膜为金属钯膜。通过比较钯膜吸收氢气前后输出端电压的变化,得出了钯膜的不同参数对系统输出的影响,钯膜的弹性模量变小使输出电压的幅值增大,延迟时间增长;密度变小使输出电压的幅值变小,延迟时间略有缩短。分析结果为改进敏感薄膜的性能提供了有益的借鉴。
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| 关 键 词： | 声表面波 氢传感器 有限元法 压电分析 |
Transient Simulation and Analysis of SAW Hydrogen Gas Sensor |
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| Authors: | ZHOU Jun-jing YIN Chen-bo |
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| Institution: | ZHOU Jun-jing1 YIN Chen-bo2 |
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| Abstract: | This article introduces the finite element model of a surface acoustic wave (SAW) delay line based on hydrogen gas sensor,which is simulated using ANSYS Version 8.0 platform. Y-X LiNbO3 was adopted as the substrate, and palladium film as the sensitive film. The output voltages in the absence and presence of hydrogen were compared, through which the effects of the material property change on the response of the sensor were analyzed. Decrease of the elastic modulus makes the output voltage delayed in time, and increases the amplitude. The analysis is useful for improving the performance of the sensitive film. |
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| Keywords: | surface acoustic wave (SAW) hydrogen gas sensor finite element method piezoelectric analysis |
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