| 直接计算法计算粗糙面薄膜的折射率和厚度 |
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| 引用本文： | 王莉,巩勇刚.直接计算法计算粗糙面薄膜的折射率和厚度[J].唐山师范学院学报,2005,27(5):57-59. |
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| 作者姓名： | 王莉 巩勇刚 |
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| 作者单位： | 唐山师范学院,物理系,河北,唐山,063000 |
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| 摘 要： | 简述了椭偏法测量非粗糙面薄膜的折射率和厚度的基本原理，推导出粗糙面薄膜的漫反射椭偏方程，给出了C语言计算程序的流程图，并对实例进行计算。
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| 关 键 词： | 椭偏法 粗糙面 直接计算法 |
| 文章编号： | 1009-9115(2005)05-0057-03 |
| 收稿时间： | 03 22 2005 12:00AM |
| 修稿时间： | 2005年3月22日 |
Direct Calculation Method of Measuring the Reflective Index and the Thickness of the Rough-Surface Films by Ellipsometry |
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| WANG Li,GONG Yong-gang.Direct Calculation Method of Measuring the Reflective Index and the Thickness of the Rough-Surface Films by Ellipsometry[J].Journal of Tangshan Teachers College,2005,27(5):57-59. |
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| Authors: | WANG Li GONG Yong-gang |
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| Abstract: | The principle of ellipsometry, which can be used to measure the reflective index and the thickness of the rough-surface films, is stated in brief. The elliptic equation of diffuse reflection on the rough surface films is deduced and its calculating framework by C is given. With this program, both the refractive index and thickness of Al films are calculated out fast and exactly, and the calculation result is satisfied. |
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| Keywords: | ellipsometry rough surfaces direct calculation method |
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