| 金刚石膜的制备方法及应用 |
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| 引用本文： | 赵利军,毕冬梅,王丽丽.金刚石膜的制备方法及应用[J].湖南科技学院学报,2007,28(9):47-48,58. |
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| 作者姓名： | 赵利军 毕冬梅 王丽丽 |
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| 作者单位： | 1. 长春大学,特殊教育学院,吉林,长春,130022
2. 长春大不,理学院,吉林,长春,130022 |
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| 摘 要： | 简单介绍了金刚石膜的化学气相沉积的主要方法、应用及其最新进展，并对各种方法的优缺点作了简要说明。
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| 关 键 词： | 金刚石膜 化学气相沉积 热丝 等离子体 |
| 文章编号： | 1673-2219（2007）09-0047-02 |
| 修稿时间： | 2007-03-23 |
Synthesis and Application of CVD Diamond Films |
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| ZHAO Li-jun,BI Dong-mei,WANG Li-li.Synthesis and Application of CVD Diamond Films[J].Journal of Hunan University of Science and Engineering,2007,28(9):47-48,58. |
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| Authors: | ZHAO Li-jun BI Dong-mei WANG Li-li |
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| Institution: | 1 College of Special Education, Changchun University, Changchun, Jinlin 130022, China; 2 College of Science, Changchun University, Changchun, Jinlin 130022, China |
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| Abstract: | The paper reviews the application of diamond films and the methods used for chemical vapor deposition diamond films at low pressure. The Advantages and disadvantages of these methods are also discussed respectively. |
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| Keywords: | diamond film CVD hot-filament plasma |
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