Measuring in-plane micro-motion of micro-structure using optical flow |
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| Authors: | Cuiyun Jin Shijiu Jin Dachao Li Jianlin Wang |
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| Institution: | 1. College of Information Science and Technology,Beijing University of Chemical Technology,Beijing 100029,China
2. State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China |
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| Abstract: | Optical flow method is one of the most important methods of analyzing motion images.Optical flow field is used to analyze characteristics of motion objects.According to motion features of micro-electronic mechanical system(MEMS)micro-structure,the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure.Firstly,high speed motion states for each frequency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle.Thus a series of image sequences,and can obtain reliable and precise optical field and reduce computing time.As micro-resonator of urement precision of the presented algorithm is high,and measurement repeatability reaches 40 am under the same experiment condition. |
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| Keywords: | micro-electronic mechanical system(MEMS) micro-motion stroboscopic imaging optical flow label field |
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