| 全自动真空磁控溅射镀膜仪研制 |
| |
| 引用本文： | 汪洪波,杨林生.全自动真空磁控溅射镀膜仪研制[J].实验技术与管理,2011,28(4):58-60,70. |
| |
| 作者姓名： | 汪洪波 杨林生 |
| |
| 作者单位： | 合肥工业大学,机械与汽车工程学院,安徽,合肥,230009 |
| |
| 基金项目： | 合肥工业大学科学研究发展基金 |
| |
| 摘 要： | 针对目前真空专业学生教学的需要,研制了全自动真空磁控溅射镀膜仪。详细介绍了镀膜仪6大部分的设计与制作。该镀膜仪具有占地面积小、功能齐全、功能拓展性强的特点,不仅能够服务于多门课程的教学实验,节约实验资源,而且为真空专业学生和教师提供了良好的创新实验平台,可开设多项专业实验和创新实验。
|
| 关 键 词： | 磁控溅射 镀膜仪 实验平台 |
Development of automatic vacuum magnetron sputtering coating apparatus |
| |
| Wang Hongbo,Yang Linsheng.Development of automatic vacuum magnetron sputtering coating apparatus[J].Experimental Technology and Management,2011,28(4):58-60,70. |
| |
| Authors: | Wang Hongbo Yang Linsheng |
| |
| Institution: | (School of Mechanical and Automotive Engineering,Hefei University of Technology,Hefei 230009,China) |
| |
| Abstract: | Considering the new teaching situation currently faced by the students majored in vacuum,an automatic vacuum magnetron sputtering coating apparatus is developed.Six parts to be designed and manufactured of the coating apparatus and the more professional and innovative experiments to be opened are presented in detail.The apparatus has the characteristics of small occupation area,multifunction and expanding the function easily.It not only can be served for teaching experiments of several courses so as to save the experimental resource,but has provided an innovative experimental platform for the students and teachers majored in vacuum. |
| |
| Keywords: | magnetron sputtering coating apparatus experimental platform |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
