| 纳米氧化铝薄膜制备及表征 |
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| 引用本文： | 杨护霞,许艳.纳米氧化铝薄膜制备及表征[J].保山学院学报,2013(2):19-21. |
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| 作者姓名： | 杨护霞 许艳 |
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| 作者单位： | 保山学院理工学院,云南保山678000 |
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| 摘 要： | 采用溶胶-凝胶法制备了不同晶型和晶粒尺寸的氧纳米化铝纳米薄膜;通过XRD及AFM分析表征了烧结温度对纳米氧化铝薄膜的晶型及颗粒尺寸变化的影响。在900℃烧结时,氧化铝结构薄膜样品以非晶相和γ-Al2O3共存,颗粒尺寸50纳米;当烧结温度为950℃时开始向θ-Al2O3转变,颗粒尺寸几乎不变,有小颗粒生成,1050℃时基本完成θ-Al2O3转变,颗粒尺寸15纳米,1200℃时基本完成向α-Al2O3的转变,颗粒尺寸20纳米,在晶型转变过程中其晶粒尺寸由大变小而后再变大。
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| 关 键 词： | 溶胶-凝胶法 纳米氧化铝薄膜 |
Preparation and characterization of nano Alumina Films |
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| YANG Hu-xia,XU-Yan.Preparation and characterization of nano Alumina Films[J].Journal of Baoshan Teachers College,2013(2):19-21. |
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| Authors: | YANG Hu-xia XU-Yan |
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| Institution: | (School of Science and Technology,Baoshan University,Baoshan 67800,China) |
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| Abstract: | nano aluminum films with different crystal type and grain size were prepared by a sol-gel method;the effect of sintering temperature on the properties of alumina film crystal form and particle size changes characterized by analysis of XRD and AFM.In 900℃ sintering of alumina films,structure with amorphous and γ-Al2O3 coexist,the particle size of 50 nm;when the sintering temperature is 950℃ began the transition to the theta-Al2O3,particle size is almost the same,there are small particles generation,theta-Al2O3 transformation basically completed 1050℃,particle size of 15 nm,change to the alpha-Al2O3 the basic completion of 1200℃,the particle size of 20 nm,in the process of transformation of its grain size from big to small and then big |
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| Keywords: | sol-gel method nano Al2O3 film |
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