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Nano-manipulation technology is an emerging field in the development of modern science and technology. Atomic force microscope （AFM）, a sharp weapon for nano imaging and nanomanipulation, which is honored as ＂eye＂ and ＂hand＂ of nano-technology. However, due to the hysteresis, creep and other nonlinearity of piezoelectric ceramics tube （PZT） as well as the probe＇s tip deviations caused by cantilever deformation, AFM has larger error of relative displacement between probe and sample, which creates enormous inconvenience to the nano-manipulation and repositioning. As to improve positioning accuracy, this dissertation presents a novel AFM＇s X-Y dimensional nano-positioning control system with large-scale based on H∞ control. Through careful research on variety of influence factors on AFM＇s precise nano-manipulation, a composite control strategy based on feedforward compensation control of cantilever probe tip＇s offset and H∞ control of piezoelectric scanner is presented in this paper. In the end, simulation results can also testify the tracking ability and better nano-positioning performance of the system. 相似文献
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