共查询到20条相似文献，搜索用时 187 毫秒
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陈辉 《福建信息技术教育》2006,(2)
MEMS在光纤通信领域的应用十分宽广,不论是光通讯交换,还是光通讯传输,几乎所有光网络中的各个组成单元都能采用MEMS制作器件。对于光通讯而言,发展全光交换系统一直是业界孜孜不倦的追求目标,而MEMS技术则被普遍认为是目前能够用来实现全光交换最有希望的技术手段,是建立WDM网络不可缺少的技术。 相似文献
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王鸿雁 《赤峰学院学报(自然科学版)》2010,26(10):39-40
美国生物学家贝塔朗非创立的系统论是信息技术发展的基础之一.系统论思想也已深入自然科学、社会科学的各个领域.目前信息技术一体化已成为必然的发展趋势,本文从信息技术发展的系统性要求出发,阐述了MEMS在信息技术一体化中的作用和在未来发展中的重要性. 相似文献
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H. Xu T. Suni V. Vuorinen J. Li H. Heikkinen P. Monnoyer M. Paulasto-Krockel 《上海大学学报(英文版)》2013,(3):226-235
Hermetic packaging is often an essential requirement to enable proper functionality throughout the device＇s lifetime and ensure the optimal performance of a micro electronic mechanical system （MEMS） device. Solid-liquid interdiffusion （SLID） bonding is a novel and attractive way to encapsulate MEMS devices at a wafer level. SLID bonding utilizes a low-melting-point metal to reduce the bonding process temperature; and metallic seal rings take out less of the valuable surface area and have a lower gas permeability compared to polymer or glass- based sealing materials. In addition, ductile metals can adopt mechanical and thermo-mechanical stresses during their service lifetime, which improves their reliability. In this study, the principles of Au-Sn and Cu-Sn SLID bonding are presented, which are meant to be used for wafer-level hermetic sealing of MEMS resonators. Seal rings in 15.24 cm silicon wafers were bonded at a width of 60 gin, electroplated, and used with Au-Sn and Cu-Sn layer structures. The wafer bonding temperature varied between 300 ℃ and 350 ℃, and the bonding force was 3.5 kN under the ambient pressure, that is, it was less than 0.1 Pa. A shear test was used to compare the mechanical properties of the interconnections between both material systems, in addition, important factors pertaining to bond ring design are discussed according to their effects on the failure mechanisms. The results show that the design ofmetal structures can significantly affect the reliability of bond rings. 相似文献
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介绍一种新型电容式加速度微传感器的结构和原理,并进行受力分析。利用ANSYS进行有限元分析,得出加速度和电容之间的非线性关系,证明了该传感器在工艺设计上的可行性。设计合适的传感器结构参数和MEMS工艺流程,制作出满足不同测量要求、有较高精度的加速度传感器。 相似文献
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王辉静 《深圳信息职业技术学院学报》2008,6(2):59-62
本文设计了一种基于MEMS技术的柔性触觉感知阵列。通过将MEMS传感器单元与柔性基板相结合,实现三维曲面上的分布力的测量。该触觉感知阵列适台安装于智能机器人手爪上,为机器人系统高效率地获取物体形状、位置和姿态信息、实现智能操作物体提供了有效的手段。 相似文献
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MEMS技术的发展与应用 总被引：1，自引：0，他引：1
刘成刚 《济南职业学院学报》2007,(1):75-77
介绍了MEMS的基本概念、系统结构、技术特点,并结合MEMS的发展史和制造技术,对MEMS的应用领域作了阐述. 相似文献
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《实验技术与管理》2013,(10):76-78
基于硅MEMS(micro-electromechanical systems)加速度传感器体积小(微米量级)、工作原理较抽象、课堂教学接受较困难等问题,构建了硅MEMS加速度传感器教学实验平台。该实验平台主要由加速度信号发生装置、高性能石英振梁加速度传感器、MEMS加速度传感器芯片、A/D转换电路、单片机数据采集及处理电路、液晶显示装置等组成。加速度信号发生装置提供不同的加速度信号。高性能石英振梁加速度传感器用于对MEMS加速度传感器的测试结果进行比对。测试结果表明,该实验平台性能良好,能够满足实验要求。该实验平台不但强化了对学生动手能力的培养,体现了实验教学与课堂教学的结合,也为传感器技术及应用、误差理论与数据处理等课程提供了重要支持。 相似文献
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普遍语法在第二语言习得中所扮演的角色依然众说纷纭。本文采纳的观点是普遍语法对第二话百习得仍起作用，但这种作用的发挥受到学习者母语的干涉。本文就第二语言习得的参数再谩问题进行了深入的探讨。在这个参数再设过程中，学习者母语的参数设置起着不可忽视的作用，同时第二语言习得的参数再设区别于学习者母语的参数设置。 相似文献
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A unity transformation model (UTM) was presented for flexible NC machining of spiral bevel gears and hypoid gears. The model can support various machining methods for Gleason spiral bevel gears and hypoid gears, including generation machining and formation machining for wheel or pinion on a universal five-axis machining center, and then directly produce NC codes for the selected machining method. Wheel machining and pinion machining under UTM were simulated in Vericut 6.0 and tested on a five-axis machining... 相似文献
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李玉红 《广东轻工职业技术学院学报》2008,7(1):15-17
本文介绍了在Pro／E环境下,如何利用扫描混合功能创建斜齿圆柱齿轮模型,并结合参数和关系式及运动分析模块等功能,实现了斜齿轮的参数化造型,并对斜齿轮传动进行运动仿真。 相似文献
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李立英 《广东轻工职业技术学院学报》2008,7(1):21-24
将设计思想与实物原型迅速、直接、精确地转变为可以再加工的CAD模型,分析了反求工程实施中的几个关键技术步骤,即数据采集,测量数据的预处理,曲面重构技术,实体造型技术,并结合复杂型面产品反求的实例,讨论反求工程CAD建模技术与思路。 相似文献
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According to Hertz theory, the difference of contact stress for non-circular gears and equivalent gears is compared in the paper, a calculating method of contact stress for non-circular gears by using equivalent gears is researched, and computing formulas of power and rotation speed for equivalent gears are deduced. A numerical simulation of contact stress for non-circular gears has also been conducted based on the finite element method. By the comparison of fitting curves, the feasibility of using equivalent gears instead of non-circular gears to calculate the contact stress is testified. 相似文献
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A unity transformation model (UTM) was presented for flexible NC machining of spiral bevel gears and hypoid gears. The model can support various machining methods for Gleason spiral bevel gears and hypoid gears, including generation machining and formation machining for wheel or pinion on a universal five-axis machining center, and then directly produce NC codes for the selected machining method. Wheel machining and pinion machining under UTM were simulated in Vericut 6.0 and tested on a five-axis machining center TDNC-W2000 with NC unit TDNC-H8. The results from simulation and real-cut verify the feasibility of gear machining under UTM as well as the correctness of NC codes. 相似文献
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Andrew C. Dwyer 《Journal of Educational Measurement》2016,53(1):3-22
This study examines the effectiveness of three approaches for maintaining equivalent performance standards across test forms with small samples: (1) common‐item equating, (2) resetting the standard, and (3) rescaling the standard. Rescaling the standard (i.e., applying common‐item equating methodology to standard setting ratings to account for systematic differences between standard setting panels) has received almost no attention in the literature. Identity equating was also examined to provide context. Data from a standard setting form of a large national certification test (N examinees = 4,397; N panelists = 13) were split into content‐equivalent subforms with common items, and resampling methodology was used to investigate the error introduced by each approach. Common‐item equating (circle‐arc and nominal weights mean) was evaluated at samples of size 10, 25, 50, and 100. The standard setting approaches (resetting and rescaling the standard) were evaluated by resampling (N = 8) and by simulating panelists (N = 8, 13, and 20). Results were inconclusive regarding the relative effectiveness of resetting and rescaling the standard. Small‐sample equating, however, consistently produced new form cut scores that were less biased and less prone to random error than new form cut scores based on resetting or rescaling the standard. 相似文献
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渐开线斜齿圆柱齿轮的参数化设计 总被引：1，自引：0，他引：1
李英 《常熟理工学院学报》2008,22(10):52-54
介绍了渐开线斜齿圆柱齿轮三维模型的设计方法及设计步骤,阐述了基于Pro／Program渐开线斜齿圆柱齿轮参数化设计的实现过程．只需要更改相关参数就可以生成新的齿轮,有效地缩短了建模周期,提高了生产效率． 相似文献