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INTRODUCTION Monocrystalline SBN (Strontium barium nio-bium, SrxBa1?xNb2O6, denoted SBNx?100, where 0.25≤x≤0.75) solid solution, is currently being inves-tigated as potential material for many micro-device applications, such as piezoelectric infrared detectors, piezoelectric, electro-optic modulators, and holo-graphic storage (Koch et al., 1998), because SBN has one of the largest known linear electro-optic coeffi-cients (r33=1300 pm/V for SBN75), two orders of magnitude larger th… 相似文献
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SiCN薄膜通过反应溅射法制备,并通过红外吸收谱（IR）进行表征。结果表明,薄膜中的N含量受衬底温度、N2流量、溅射功率影响。低的衬底温度会有利于N的进入,衬底温度过高,N含量将显著下降。在恰当的N2流量下才能在薄膜中获得最高的N含量。提高溅射功率可以使得薄膜中N含量升高。 相似文献
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